Substrate placement in immersion lithography

ABSTRACT

A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position of an alignment mark of the test substrate while in the depression, and determining the offset between the center of the substrate and the center of the depression from the position of the alignment mark.

The present application is a continuation of U.S. patent applicationSer. No. 13/672,539, filed Nov. 8, 2012, now U.S. Pat. No. 9,182,222,which is a continuation of U.S. patent application Ser. No. 13/288,714,filed Nov. 3, 2011, now U.S. Pat. No. 8,441,617, which is a divisionalapplication of U.S. patent application Ser. No. 11/907,045, filed Oct.9, 2007, now U.S. Pat. No. 8,077,291, which is a divisional applicationof U.S. patent application Ser. No. 11/008,576, filed Dec. 10, 2004, nowU.S. Pat. No. 7,352,440, which is incorporated herein by reference inits entirety.

FIELD

The present invention relates to a lithographic apparatus and inparticular to an immersion lithographic apparatus and a method ofsubstrate placement in an immersion lithographic apparatus.

BACKGROUND

A lithographic apparatus is a machine that applies a desired patternonto a substrate, usually onto a target portion of the substrate. Alithographic apparatus can be used, for example, in the manufacture ofintegrated circuits (ICs). In that instance, a patterning device, whichis alternatively referred to as a mask or a reticle, may be used togenerate a circuit pattern to be formed on an individual layer of theIC. This pattern can be transferred onto a target portion (e.g.comprising part of, one, or several dies) on a substrate (e.g. a siliconwafer). Transfer of the pattern is typically via imaging onto a layer ofradiation-sensitive material (resist) provided on the substrate. Ingeneral, a single substrate will contain a network of adjacent targetportions that are successively patterned. Known lithographic apparatusinclude so-called steppers, in which each target portion is irradiatedby exposing an entire pattern onto the target portion at one time, andso-called scanners, in which each target portion is irradiated byscanning the pattern through a radiation beam in a given direction (the“scanning”-direction) while synchronously scanning the substrateparallel or anti-parallel to this direction. It is also possible totransfer the pattern from the patterning device to the substrate byimprinting the pattern onto the substrate.

It has been proposed to immerse the substrate in the lithographicprojection apparatus in a liquid having a relatively high refractiveindex, e.g., water, so as to fill a space between the final element ofthe projection system and the substrate. The point of this is to enableimaging of smaller features since the exposure radiation will have ashorter wavelength in the liquid. (The effect of the liquid may also beregarded as increasing the effective numerical aperture (NA) of thesystem and also increasing the depth of focus.) Other immersion liquidshave been proposed, including water with solid particles (e.g., quartz)suspended therein.

However, submersing the substrate or substrate and substrate table in abath of liquid (see for example United States patent U.S. Pat. No.4,509,852, hereby incorporated in its entirety by reference) means thatthere is a large body of liquid that must be accelerated during ascanning exposure. This requires additional or more powerful motors andturbulence in the liquid may lead to undesirable and unpredictableeffects.

One of the solutions proposed is for a liquid supply system to provideliquid on only a localized area of the substrate and in between thefinal element of the projection system and the substrate (the substrategenerally has a larger surface area than the final element of theprojection system). One way which has been proposed to arrange for thisis disclosed in PCT patent application no. WO 99/49504, herebyincorporated in its entirety by reference. As illustrated in FIGS. 2 and3, liquid is supplied by at least one inlet IN onto the substrate,preferably along the direction of movement of the substrate relative tothe final element, and is removed by at least one outlet OUT afterhaving passed under the projection system. That is, as the substrate isscanned beneath the element in a −X direction, liquid is supplied at the+X side of the element and taken up at the −X side. FIG. 2 shows thearrangement schematically in which liquid is supplied via inlet IN andis taken up on the other side of the element by outlet OUT which isconnected to a low pressure source. In the illustration of FIG. 2 theliquid is supplied along the direction of movement of the substraterelative to the final element, though this does not need to be the case.Various orientations and numbers of in- and out-lets positioned aroundthe final element are possible, one example is illustrated in FIG. 3 inwhich four sets of an inlet with an outlet on either side are providedin a regular pattern around the final element.

SUMMARY

An aspect of the present invention is to provide a method fordetermining an offset between a center of a substrate and a center of adepression in a chuck. The method includes providing a test substrate tothe depression, the test substrate having a dimension smaller than adimension of the depression, measuring a position of an alignment markof the test substrate while in the depression and determining the offsetbetween the center of the substrate and the center of the depressionfrom the position of the alignment mark.

In an embodiment of the invention, providing the test substrate to thedepression includes loading the test substrate with a substrate handlerinside the depression.

In an embodiment of the invention, measuring the position of thealignment mark of the test substrate comprises measuring the position ofthe alignment mark relative to a reference mark of the chuck or viceversa.

The method may further comprise determining a position of the center ofthe depression relative to a position of a reference mark of the chuckor vice versa, and determining a position of the center of the testsubstrate relative to the position of the alignment mark of the testsubstrate or vice versa.

In an embodiment of the invention, measuring the position of the centerof the test substrate can be performed with a prealigner.

In an embodiment of the invention, the dimension of the test substrateis such that, when the test substrate is in the depression, a gapbetween an edge of the test substrate and an edge of the depression isgreater than a maximum offset.

In an embodiment of the invention, measuring the position of thealignment mark of the test substrate is performed with an opticalsystem. The optical system may include, for example, an interferometerand an optical alignment system.

The method may further comprise calibrating a substrate handler to takeinto account the offset.

In an embodiment of the invention, calibrating the substrate handlerincludes shifting a positioning of substrates by the substrate handlerto correct for the offset so that a subsequent substrate provided by thesubstrate handler to the depression is substantially centered inside thedepression.

Another aspect of the present invention is to provide a method fordetermining an offset between a center of a substrate and a center of adepression in a chuck. The method includes measuring a gap between anedge of the substrate disposed inside the depression and an edge of thedepression at a plurality of locations, determining a center of thesubstrate using the measurements of the gap, and determining a chuckcentering offset of the substrate between the center of the depressionand the measured center of the substrate at the chuck. The methodfurther includes providing the substrate to a prealigner and determininga center of the substrate at the prealigner, determining a prealignercentering offset between a nominal center of the substrate and themeasured center of the substrate at the prealigner, and combining thechuck centering offset and the prealigner centering offset to obtain aglobal centering offset.

The method may further include determining a position of the edge of thedepression and calculating a center of the depression.

In an embodiment of the invention, determining the chuck centeringoffset includes determining the position of the center of the substraterelative to the position of the center of the depression.

In an embodiment of the invention, measuring the gap includes scanningthe gap across an optical beam and measuring an intensity variation in areflection of the optical beam.

In an embodiment of the invention, determining the center of thesubstrate using the measurements of the gap includes determining aposition of the edge of the substrate and calculating the position ofthe center of the substrate from the position of the edge.

In an embodiment of the invention, the substrate can be disposed insidethe depression and can be removed from the depression using a substratehandler.

The method may further include calibrating the substrate handler to takeinto account the global centering offset.

In an embodiment of the invention, calibrating the substrate handlerincludes shifting positioning of substrates by the substrate handler byan offset to correct for the global centering offset so that asubsequently positioned substrate is substantially centered inside thedepression.

In an embodiment of the invention, calibrating the substrate handlerincludes correcting for substrate positioning so that the gap of asubsequently positioned substrate is equally wide inside the depression.

A further aspect of the present invention is to provide a method fordetermining an offset between a center of a substrate and a center of adepression in a chuck. The method includes loading the substrate on apin of the chuck and moving the substrate by translating the pin in afirst direction until the substrate reaches an opening of the depressionin the chuck, determining to what extent the substrate should betranslated in a plane substantially perpendicular to the first directionto allow the substrate to enter inside the depression without collidingwith a surface of the chuck or an edge of the depression in the chuck,and determining the offset of the substrate relative to the depressionfrom determination of the translation in the plane.

In an embodiment of the invention, determining to what extent thesubstrate should be translated includes translating the substrate, inthe plane on the pin relative to the chuck, translating the chuck, inthe plane, relative to the substrate or the pin, or both, until afootprint of the substrate would fit into the depression.

In an embodiment of the invention loading the substrate on a pin of thechuck is performed with a substrate handler.

The method may also include calibrating the substrate handler to takeinto account the offset.

In an embodiment of the invention, calibrating the substrate handlerincludes shifting positioning of substrates by of the substrate handlerby an amount to correct for the offset so that a subsequently positionedsubstrate is substantially centered inside the depression.

In an embodiment of the invention, calibrating the substrate handlerincludes correcting for substrate positioning so that the gap of asubsequently positioned substrate is equally wide inside the depression.

Another aspect of the present invention is to provide a lithographicprojection apparatus. The lithographic apparatus includes a supportstructure configured to hold a patterning device. The patterning deviceis configured to pattern a beam of radiation according to a desiredpattern. The lithographic apparatus also includes a substrate tableconfigured to hold a substrate. The substrate table has a depression forreceiving the substrate. The lithographic apparatus has a projectionsystem configured to project the patterned beam onto a target portion ofthe substrate. The lithographic apparatus also includes a liquid supplysystem configured to provide a liquid, through which the patterned beamis to be projected, in a space between the projection system and thesubstrate and a sensor configured to measure a position of thesubstrate, a sensor configured to measure a gap between an edge of thesubstrate disposed inside the depression and an edge of the depression,or a sensor configured to measure both the position and the gap. Thelithographic apparatus further includes a substrate handling system incommunication with the sensor configured to position the substrateinside the depression such that the gap between the edge of thesubstrate and the edge of the depression is substantially uniform insidethe depression.

In an embodiment, the substrate handling system is configured to becalibrated to correct for an offset between the substrate and thedepression. In an embodiment, the substrate handling system isconfigured to determine an offset between a center of the substrate anda center of the depression. In an embodiment, the sensor configured tomeasure the position of the substrate is configured to measure aposition of an alignment mark of a test substrate disposed inside thedepression, and wherein the substrate handling system is configured todetermine an offset between a center of the test substrate and a centerof the depression from the position of the alignment mark measured bythe sensor. In an embodiment, the substrate handling system isconfigured to determine to what extent the substrate should betranslated in a plane substantially parallel to the substrate table toallow the substrate to enter inside the depression without collidingwith a surface of the substrate table or an edge of the depression. Inan embodiment, the substrate handling system is configured to determinean offset between the substrate and the depression from determination ofthe translation in the plane. In an embodiment, the substrate handlingsystem is configured to determine a center of the substrate usingmeasurements of the gap and to determine an offset of the substratebetween a center of the depression and the measured center of thesubstrate. In an embodiment, the apparatus further comprises aprealigner configured to measure a center of the substrate at theprealigner and wherein the substrate handling system is configured todetermine a centering offset at the prealigner between a nominal centerof the substrate and the measured center of the substrate at theprealigner. In an embodiment, the substrate handling system isconfigured to combine the offset of the substrate and the centeringoffset to obtain a global centering offset.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings in whichcorresponding reference symbols indicate corresponding parts, and inwhich:

FIG. 1 depicts a lithographic apparatus according to an embodiment ofthe invention;

FIGS. 2 and 3 depict a liquid supply system for use in a lithographicprojection apparatus;

FIG. 4 depicts another liquid supply system for use in a lithographicprojection apparatus;

FIG. 5 depicts a further liquid supply system for use in a lithographicprojection apparatus;

FIG. 6 depicts the liquid supply system of FIG. 5 in relation to with asubstrate and substrate table according to an embodiment of theinvention;

FIG. 7 shows a substrate table having a depression in which a substrateis disposed, according to an embodiment of the invention;

FIG. 8 shows a situation where a substrate is disposed inside adepression in a substrate table and the substrate is not centeredrelative to the depression according to an embodiment of the invention;

FIG. 9 shows a substrate with an alignment mark disposed inside adepression of substrate table, and the substrate table having areference mark, according to an embodiment of the invention;

FIG. 10 shows a substrate disposed inside a depression and a gap betweenan edge of the substrate and an edge of the depression at variouslocations, according to an embodiment of the invention; and

FIG. 11 shows a situation where a substrate is held by one or more pinsabove the opening of the depression in accordance with an embodiment ofthe present invention.

DETAILED DESCRIPTION

FIG. 1 schematically depicts a lithographic apparatus according to oneembodiment of the invention. The apparatus comprises:

an illumination system (illuminator) IL configured to condition aradiation beam PB (e.g. UV radiation or DUV radiation);

a support structure (e.g. a mask table) MT constructed to support apatterning device (e.g. a mask) MA and connected to a first positionerPM configured to accurately position the patterning device in accordancewith certain parameters;

a substrate table (e.g. a wafer table) WT constructed to hold asubstrate (e.g. a resist-coated wafer) W and connected to a secondpositioner PW configured to accurately position the substrate inaccordance with certain parameters; and

a projection system (e.g. a refractive projection lens system) PLconfigured to project a pattern imparted to the radiation beam PB bypatterning device MA onto a target portion C (e.g. comprising one ormore dies) of the substrate W.

The illumination system may include various types of optical components,such as refractive, reflective, magnetic, electromagnetic, electrostaticor other types of optical components, or any combination thereof, fordirecting, shaping, or controlling radiation.

The support structure supports, i.e. bears the weight of, the patterningdevice. It holds the patterning device in a manner that depends on theorientation of the patterning device, the design of the lithographicapparatus, and other conditions, such as for example whether or not thepatterning device is held in a vacuum environment. The support structurecan use mechanical, vacuum, electrostatic or other clamping techniquesto hold the patterning device. The support structure may be a frame or atable, for example, which may be fixed or movable as required. Thesupport structure may ensure that the patterning device is at a desiredposition, for example with respect to the projection system. Any use ofthe terms “reticle” or “mask” herein may be considered synonymous withthe more general term “patterning device.”

The term “patterning device” used herein should be broadly interpretedas referring to any device that can be used to impart a radiation beamwith a pattern in its cross-section such as to create a pattern in atarget portion of the substrate. It should be noted that the patternimparted to the radiation beam may not exactly correspond to the desiredpattern in the target portion of the substrate, for example if thepattern includes phase-shifting features or so called assist features.Generally, the pattern imparted to the radiation beam will correspond toa particular functional layer in a device being created in the targetportion, such as an integrated circuit.

The patterning device may be transmissive or reflective. Examples ofpatterning devices include masks, programmable mirror arrays, andprogrammable LCD panels. Masks are well known in lithography, andinclude mask types such as binary, alternating phase-shift, andattenuated phase-shift, as well as various hybrid mask types. An exampleof a programmable mirror array employs a matrix arrangement of smallmirrors, each of which can be individually tilted so as to reflect anincoming radiation beam in different directions. The tilted mirrorsimpart a pattern in a radiation beam which is reflected by the mirrormatrix.

The term “projection system” used herein should be broadly interpretedas encompassing any type of projection system, including refractive,reflective, catadioptric, magnetic, electromagnetic and electrostaticoptical systems, or any combination thereof, as appropriate for theexposure radiation being used, or for other factors such as the use ofan immersion liquid or the use of a vacuum. Any use of the term“projection lens” herein may be considered as synonymous with the moregeneral term “projection system”.

As here depicted, the apparatus is of a transmissive type (e.g.employing a transmissive mask). Alternatively, the apparatus may be of areflective type (e.g. employing a programmable mirror array of a type asreferred to above, or employing a reflective mask).

The lithographic apparatus may be of a type having two (dual stage) ormore substrate tables (and/or two or more mask tables). In such“multiple stage” machines the additional tables may be used in parallel,or preparatory steps may be carried out on one or more tables while oneor more other tables are being used for exposure.

Referring to FIG. 1, the illuminator IL receives a radiation beam from aradiation source SO. The source and the lithographic apparatus may beseparate entities, for example when the source is an excimer laser. Insuch cases, the source is not considered to form part of thelithographic apparatus and the radiation beam is passed from the sourceSO to the illuminator IL with the aid of a beam delivery system BDcomprising, for example, suitable directing mirrors and/or a beamexpander. In other cases the source may be an integral part of thelithographic apparatus, for example when the source is a mercury lamp.The source SO and the illuminator IL, together with the beam deliverysystem BD if required, may be referred to as a radiation system.

The illuminator IL may comprise an adjuster AD for adjusting the angularintensity distribution of the radiation beam. Generally, at least theouter and/or inner radial extent (commonly referred to as σ-outer andσ-inner, respectively) of the intensity distribution in a pupil plane ofthe illuminator can be adjusted. In addition, the illuminator IL maycomprise various other components, such as an integrator IN and acondenser CO. The illuminator may be used to condition the radiationbeam, to have a desired uniformity and intensity distribution in itscross-section.

The radiation beam PB is incident on the patterning device (e.g., maskMA), which is held on the support structure (e.g., mask table MT), andis patterned by the patterning device. Having traversed the mask MA, theradiation beam PB passes through the projection system PL, which focusesthe beam onto a target portion C of the substrate W. An immersion hoodIH, which is described further below, supplies immersion liquid to aspace between the final element of the projection system PL and thesubstrate W.

With the aid of the second positioner PW and position sensor IF (e.g. aninterferometric device, linear encoder or capacitive sensor), thesubstrate table WT can be moved accurately, e.g. so as to positiondifferent target portions C in the path of the radiation beam PB.Similarly, the first positioner PM and another position sensor (which isnot explicitly depicted in FIG. 1) can be used to accurately positionthe mask MA with respect to the path of the radiation beam PB, e.g.after mechanical retrieval from a mask library, or during a scan. Ingeneral, movement of the mask table MT may be realized with the aid of along-stroke module (coarse positioning) and a short-stroke module (finepositioning), which form part of the first positioner PM. Similarly,movement of the substrate table WT may be realized using a long-strokemodule and a short-stroke module, which form part of the secondpositioner PW. In the case of a stepper (as opposed to a scanner) themask table MT may be connected to a short-stroke actuator only, or maybe fixed. Mask MA and substrate W may be aligned using mask alignmentmarks M1, M2 and substrate alignment marks P1, P2. Although thesubstrate alignment marks as illustrated occupy dedicated targetportions, they may be located in spaces between target portions (theseare known as scribe-lane alignment marks).

Similarly, in situations in which more than one die is provided on themask MA, the mask alignment marks may be located between the dies.

The depicted apparatus could be used in at least one of the followingmodes:

1. In step mode, the mask table MT and the substrate table WT are keptessentially stationary, while an entire pattern imparted to theradiation beam is projected onto a target portion C at one time (i.e. asingle static exposure). The substrate table WT is then shifted in the Xand/or Y direction so that a different target portion C can be exposed.In step mode, the maximum size of the exposure field limits the size ofthe target portion C imaged in a single static exposure.

2. In scan mode, the mask table MT and the substrate table WT arescanned synchronously while a pattern imparted to the radiation beam isprojected onto a target portion C (i.e. a single dynamic exposure). Thevelocity and direction of the substrate table WT relative to the masktable MT may be determined by the (de-)magnification and image reversalcharacteristics of the projection system PL. In scan mode, the maximumsize of the exposure field limits the width (in the non-scanningdirection) of the target portion in a single dynamic exposure, whereasthe length of the scanning motion determines the height (in the scanningdirection) of the target portion.

3. In another mode, the mask table MT is kept essentially stationaryholding a programmable patterning device, and the substrate table WT ismoved or scanned while a pattern imparted to the radiation beam isprojected onto a target portion C. In this mode, generally a pulsedradiation source is employed and the programmable patterning device isupdated as required after each movement of the substrate table WT or inbetween successive radiation pulses during a scan. This mode ofoperation can be readily applied to maskless lithography that utilizesprogrammable patterning device, such as a programmable mirror array of atype as referred to above.

Combinations and/or variations on the above described modes of use orentirely different modes of use may also be employed.

A further immersion lithography solution with a localized liquid supplysystem is shown in FIG. 4. Liquid is supplied by two groove inlets IN oneither side of the projection system PL and is removed by a plurality ofdiscrete outlets OUT arranged radially outwardly of the inlets IN. Theinlets IN and OUT can be arranged in a plate with a hole in its centerand through which the projection beam is projected. Liquid is suppliedby one groove inlet IN on one side of the projection system PL andremoved by a plurality of discrete outlets OUT on the other side of theprojection system PL, causing a flow of a thin film of liquid betweenthe projection system PL and the substrate W. The choice of whichcombination of inlet IN and outlets OUT to use can depend on thedirection of movement of the substrate W (the other combination of inletIN and outlets OUT being inactive).

Another immersion lithography solution with a localized liquid supplysystem solution which has been proposed is to provide the liquid supplysystem with a seal member which extends along at least a part of aboundary of the space between the final element of the projection systemand the substrate table. Such a solution is illustrated in FIG. 5. Theseal member is substantially stationary relative to the projectionsystem in the XY plane though there may be some relative movement in theZ direction (in the direction of the optical axis). A seal is formedbetween the seal member and the surface of the substrate.

Referring to FIG. 5, reservoir 10 forms a contactless seal to thesubstrate around the image field of the projection system so that liquidis confined to fill a space between the substrate surface and the finalelement of the projection system. The reservoir is formed by a sealmember 12 positioned below and surrounding the final element of theprojection system PL. Liquid is brought into the space below theprojection system and within the seal member 12. The seal member 12extends a little above the final element of the projection system andthe liquid level rises above the final element so that a buffer ofliquid is provided. The seal member 12 has an inner periphery that atthe upper end, in an embodiment, closely conforms to the shape of theprojection system or the final element thereof and may, e.g., be round.At the bottom, the inner periphery closely conforms to the shape of theimage field, e.g., rectangular though this need not be the case.

The liquid is confined in the reservoir by a gas seal 16 between thebottom of the seal member 12 and the surface of the substrate W. The gasseal is formed by gas, e.g. air or synthetic air but, in an embodiment,N₂ or another inert gas, provided under pressure via inlet 15 to the gapbetween seal member 12 and substrate and extracted via first outlet 14.The overpressure on the gas inlet 15, vacuum level on the first outlet14 and geometry of the gap are arranged so that there is a high-velocitygas flow inwards that confines the liquid. Such a system is disclosed inU.S. patent application Ser. No. 10/705,783, hereby incorporated in itsentirety by reference.

The reservoir 10 between the final element of the projection system andthe substrate which is filled with liquid may come close to an edge ofthe substrate W during the scanning operation of the substrate. In orderto limit or prevent liquid leakage when exposing an edge of thesubstrate, the substrate is arranged such that an upper surface of thesubstrate W is at substantially a same level as the substrate table (orchuck) WT, as illustrated in FIG. 6. For example, the substrate isdisposed in a depression or a cavity DP in the chuck WT so that theupper surface of the substrate is at substantially a same level as thechuck. While the depression DP is shown as circular herein, thedepression DP may be any other shape.

As shown in more detail in FIG. 7, because liquid may seep between anedge 20 of the substrate W and an edge 22 of the depression DP, theradial dimension R_(D) of the depression DP in the chuck WT (in theplane XY) is selected to be as close as possible to the radial dimensionR_(W) of the substrate. Furthermore, because the gas seal 16 (shown inFIG. 6) between the bottom of the seal member 12 and the surface of thesubstrate W may hover between the edge 20 of the substrate W and theedge 22 of the depression DP, for example, when an edge of the substrateis exposed to radiation, the gas seal may become unstable. Therefore,for this additional reason, the radial dimension R_(D) of the depressionDP in the chuck WT (in the plane XY) is selected to be as close aspossible to the radial dimension R_(W) of the substrate. However, inpractice the radial dimension R_(D) of the depression DP is made to beslightly larger than the radial dimension R_(W) of the substrate toallow the substrate to enter inside the depression and also tofacilitate removal of the substrate. But, at the same time, thedimension of the depression is selected so as to limit or preventseepage of liquid between an edge 20 of the substrate W and an edge 22of the depression DP in the chuck WT.

In an implementation, a gap G between the edge 20 of the substrate W andthe edge 22 of the depression DP, of for example 0.5 mm, is madeavailable to all sides of a well-centered substrate W. Due to, forexample, inaccuracies of the substrate hander in handling andpositioning the substrate inside the depression in the chuck, however,the substrate may not be perfectly centered, as illustrated in FIG. 8.For example, the edge 20R of the substrate W is closer to the edge 22Rof the depression DP than the edge 20L of the substrate W is withrespect to the edge 22L of the depression DP. In other words, the gap G1between the edge 20L of the substrate and the edge 22L of depression islarger than the gap G2 between the edge 20R of the substrate and theedge 22R of the depression. In this case, an offset Δ of a center C_(S)of the substrate W with respect to the center C_(D) of the depression DP(or vice versa) is present. In an embodiment, the offset may be a vectorand values for the offset referenced herein may be the length of theoffset vector. In practice, an offset Δ of maximally 0.6 mm with arandom variation of 0.1 mm may be present.

In conventional lithographic projection apparatus, i.e., non-immersionlithographic projection apparatus, it is not required to correct anoffset between the substrate center and the chuck center duringplacement of the substrate on the chuck. The substrate W is loaded andpositioned on the chuck and then the offset between centers (if notalready partially corrected during placement of the substrate of thechuck) can be corrected to the expected position of the substrateitself.

In an immersion lithographic projection apparatus, however, thesubstrate W is disposed inside the depression DP in the chuck WT and theoffset Δ as discussed above can be as much as 0.6 mm, for example. Thismay lead to the situation where one edge, for example edge 20L, of thesubstrate 20 is distant from an edge, for example edge 22L, of thedepression DP by as much as 1.0 mm. This gap G1 on one side of 1.0 mmcorresponds to the initial G gap on one side of 0.5 mm (if the substrateis well-centered inside the depression) compounded with an offset Δ of0.5 mm. This gap G1 of 1.0 mm at one side of the substrate may be toolarge which may lead to seepage of liquid through this gap and/or maylead to instability of the gas seal hovering on top of the gap G1. Thismay be particularly undesirable in lithography because this may requireremoval of the substrate and cleaning of the substrate and substratetable which leads inevitably to slowing down of the production processor may lead to instability of the gas seal which would also lead toproblems in holding the liquid in place.

In addition, if, for example, the offset Δ is 0.6 mm, the substrate edge20R can hit the edge 22R of the depression DP because the offset Δ of0.6 mm is greater than the supposed available G gap of 0.5 mm if thesubstrate W was well-centered (Δ>G). In this condition, the substrate Wcannot be loaded inside the depression DP. This situation is alsoundesirable because any error in the placement of a substrate W duringmanufacturing may lead to a downtime of the machine resulting in loss ofproductivity.

Therefore, it is desired to determine the offset Δ of the substrate Winside the depression DP so that the substrate handling system can becalibrated to take into account the offset so that the above unwantedsituation or situations may be prevented. If the offset of the substrateinside the depression is determined and the substrate handling systemcalibrated to take into account the offset, it may be possible thetailor the dimension(s) of the depression so that the substrate fitsmore precisely in the depression and as a result the gap can be furtherminimized.

In an embodiment, a method for determining the offset between the centerof the substrate and the center of the depression is to use a slightlysmaller test substrate W than the depression DP and then a normalproduction substrate to ensure that the test substrate W can be loadedby the substrate handler independent of the size of the offset. Forexample, the dimension of the test substrate W can be selected such thatthe gap G (for example 1.0 mm) is greater than a maximum offset Δ (forexample 0.6 mm), i.e., G>Δmax. In this situation, even if the offset ismaximum, e.g., equal to 0.6 mm, the test substrate W would still be ableto be placed inside the depression DP because an offset of 0.6 mm issmaller than a gap G of 1.0 mm. The substrate handler loads the testsubstrate W with the intention that it is centered in the depression DP(even though there may in fact be an unknown offset). With the testsubstrate disposed inside the depression DP, the determination andcalibration of the offset can be performed.

Referring to FIG. 9, an alignment mark AM is provided on the testsubstrate W and the position of the center of the substrate C_(s)relative to the alignment mark AM on the test substrate W can bedetermined or is otherwise known. For example, the position of thecenter C_(S) of the test substrate W relative to the position of thealignment mark AM of the test substrate W may be measured with aprealigner. A prealigner is an apparatus in the substrate handler whichcenters the substrate to a certain position in the coordinates of thesubstrate handler based on edge sensing information or optical detectionof alignment marks on the substrate W. The chuck WT is also providedwith a reference mark (i.e., a fiducial mark) FM and the position of thecenter C_(D) of the depression DP relative the position of the fiducialmark FM can also be determined or is otherwise known. Then, for example,by measuring the position of the alignment mark AM of the test substrateW relative to the position of the reference mark FM (or vice versa), theoffset Δ between the center C_(S) of the test substrate W and the centerC_(D) of the depression DP can be determined. The position of thealignment mark AM and the reference mark FM may be measured for examplewith available optical systems such as an interferometer and an opticalalignment system.

In addition, or alternatively, the lithographic apparatus may havenominal positions for where the alignment mark AM and the fiducial markFM should be located for proper centering of the test substrate W. Oncethe test substrate W is disposed in the depression DP, the actualpositions of the alignment mark AM and the fiducial mark FM can bedetermined and the offset Δ can be determined from the differencebetween the nominal and actual positions.

By knowing the offset Δ in the positioning of the test substrate W, thesubstrate handler can be calibrated to take into account the offset Δ.In particular, the position of the mechanism of the substrate handlermay be calibrated so that any position of a substrate by the substratehandler may correct for the offset. In this manner, subsequent loads ofproduction substrates onto the substrate table will be properly centeredin the depression DP.

In another embodiment, a method for determining the offset Δ between thecenter of the substrate and the center of the depression is, forexample, to “manually” dispose a typical production substrate W in thedepression DP to ensure that the substrate W is inside the depressionDP. By “manually” disposing is meant that the substrate W is in thedepression DP. This may be done, for example, by a technician puttingthe substrate W in the depression DP, by the normal operation of thesubstrate handler if the substrate W properly goes into the depressionDP, by combination of normal operation of the substrate handler W andsubsequent adjustments made to the position of the substrate W by, e.g.,the substrate handler so that the substrate W is properly disposed inthe depression DP or by any other means.

With the substrate disposed inside the depression DP, as shown in FIG.10, the width of the gap G between an edge of the substrate and an edgeof the depression DP is measured at a plurality of locations (at least3) around the substrate W. This is performed by using, for example, anoptical system such as a level sensor. For example, while the substrateW is disposed inside the depression DP, a radiation beam is scannedacross the gap (for example, by displacing the substrate table WT whilethe beam is kept in position) and an intensity variation is measured ina reflection of the beam. By measuring the intensity of the radiationwhile the beam is moved across the gap, the width of the gap can bemeasured, for example, by a position/displacement measuring system (orthe substrate table WT). Using the measurements of the gap at theplurality of locations, the center C_(S) of the substrate W can bedetermined in the coordinate system of the chuck. For example, using themeasurements of the gap width and the position on the edge of thedepression DP of one and of the gap G, the position of the edge of thesubstrate can be determined and hence the position of the center of thesubstrate can be determined.

In an alternative or additional embodiment, the position of the edge ofthe substrate W at a plurality of locations can be measured directlyusing, for example, an intensity variation at a scanning radiation beamof a level sensor and the position of the impact of that beam on thesubstrate/substrate table determined from an interferometer measurementof the position of the substrate table.

The position of the center C_(D) of the depression DP in the coordinatesystem of the chuck can either be known from other measurements or canbe also determined by measurements of the edge of the depression DP.With the knowledge of the position of the center C_(S) of the substrateand the position of the center C_(D) of the depression, the chuckcentering offset of the substrate W in the depression DP, i.e., in thechuck coordinate system, can be determined. The chuck centering offset Δcan, for example, be determined by calculating the position of thecenter C_(S) of the substrate W relative to the position of the centerC_(D) of the depression DP

Subsequently, the substrate W is provided, by using a substrate handler,to a prealigner and the position of the center C_(S) of the substrate Wis measured with the prealigner. The prealigner has a nominal center ofthe substrate W in the pre-aligner coordinate system. A pre-alignercentering offset can be determined between the normal and measuredcenters of the substrate W in the prealigner coordinate system. Thechuck centering offset in the chuck coordinate system and the prealignercenter of offset in the prealigner coordinate system are then combinedand a global offset is calculated. The substrate handler is calibratedto take into account the global offset. In the calibration of thesubstrate handler, the positioning, i.e., coordinate system, ofsubstrates by the substrate handler is corrected to take account of theglobal offset so that the gap of a substrate subsequently positioned inthe depression is equally wide and thus the substrate is substantiallycentered inside the depression.

A chuck is typically provided with a substrate displacement mechanismthat includes at least one pin. The mechanism is used to displace thesubstrate onto the chuck or to displace the substrate from the chuck.The substrate is positioned on and/or carried away from the substratereplacement mechanism, or the chuck itself, by a substrate handler. Thesubstrate handler is typically a motor driven robot arm that has a forkfor carrying the substrate. In the case of an immersion lithographicapparatus, the pin or pins are provided inside the depression in thechuck so that the substrate can be displaced into and out of thedepression.

In an embodiment of the invention, a method for determining the offsetbetween the center of the substrate W and the center of the depressionDP is to load a substrate W on a pin or pins of the chuck WT, as shownin FIG. 11, by using the substrate handler and then displacing thesubstrate W by, e.g., lowering in the Z direction, the pin(s) until thesubstrate W reaches the opening of the depression DP in the chuck WT.The substrate is displaced until it reaches the limit of the opening ofthe depression DP in the chuck WT (as illustrated in FIG. 11) so as toensure that the substrate does not collide with a surface ST of thechuck or an edge of the depression DP. Although three pins are shown inFIG. 11, one can appreciate that one or more pins may be used to holdthe substrate. Once the substrate W reaches the limit of the opening, adetermination is made as to what extent the substrate W should betranslated in X and/or Y coordinates to allow the substrate W to enterinside the depression DP without colliding with a surface of the chuckWT or an edge of the depression DP. Such a determination may be made,e.g., by using an alignment system to measure a mark on the substrateand a mark on the chuck WT. If a translator is needed, the substrate Wmay be translated in the X and/or Y directions on the pin(s) relative tothe chuck WT, the chuck weight may be translated in the X and/or Ydirections relative to the pin(s) or the substrate, or a combination ofboth translations may be made until a footprint of the substrate W wouldfit into the depression DP. The translation in X and/or Y directionsused to make the substrate W footprint fit into the depression DP isthen the offset Δ of the center of the substrate W relative to thedepression DP.

With the offset Δ, the substrate handler can be calibrated to take intoaccount the offset Δ. In the calibration of the substrate handler, thepositioning of a substrate W by the substrate handler is shifted by theoffset Δ to correct for the offset Δ so that a subsequent substrateloaded by the substrate handler to the chuck WT is centered inside thedepression DP. As a result, subsequent substrate loads are positionedcorrectly on the pin(s) for positioning substrates centrally inside thedepression without likelihood of collision with a surface of the chuck.

In an embodiment, there is provided a method for determining an offsetbetween a center of a substrate and a center of a depression in a chuck,comprising: providing a test substrate to the depression, the testsubstrate having a dimension smaller than a dimension of the depression;measuring a position of an alignment mark of the test substrate while inthe depression; and determining the offset between the center of thesubstrate and the center of the depression from the position of thealignment mark.

In an embodiment, providing the test substrate to the depressioncomprises loading the test substrate inside the depression using asubstrate handler. In an embodiment, measuring the position of thealignment mark of the test substrate comprises measuring the position ofthe alignment mark relative to a reference mark of the chuck or viceversa. In an embodiment, the method further comprises determining aposition of the center of the depression relative to a position of areference mark of the chuck or vice versa; and determining a position ofthe center of the test substrate relative to the position of thealignment mark of the test substrate or vice versa. In an embodiment,measuring the position of the center of the test substrate is performedwith a prealigner. In an embodiment, the dimension of the test substrateis such that, when the test substrate is in the depression, a gapbetween an edge of the test substrate and an edge of the depression isgreater than a maximum offset. In an embodiment, measuring the positionof the alignment mark of the test substrate is performed with an opticalsystem. In an embodiment, the optical system comprises an interferometerand an optical alignment system. In an embodiment, the method furthercomprises calibrating a substrate handler to take into account theoffset. In an embodiment, calibrating the substrate handler includesshifting a positioning of substrates by the substrate handler to correctfor the offset so that a subsequent substrate provided by the substratehandler to the depression is substantially centered inside thedepression.

In an embodiment, there is provided a method for determining an offsetbetween a center of a substrate and a center of a depression in a chuck,comprising: measuring a gap between an edge of the substrate disposedinside the depression and an edge of the depression at a plurality oflocations; determining a center of the substrate using the measurementsof the gap; determining a chuck centering offset of the substratebetween the center of the depression and the measured center of thesubstrate at the chuck; providing the substrate to a prealigner anddetermining a center of the substrate at the prealigner; determining aprealigner centering offset between a nominal center of the substrateand the measured center of the substrate at the prealigner; andcombining the chuck centering offset and the prealigner centering offsetto obtain a global centering offset.

In an embodiment, the method further comprises determining a position ofthe edge of the depression and calculating a center of the depression.In an embodiment, determining the chuck centering offset comprisesdetermining the position of the center of the substrate relative to theposition of the center of the depression. In an embodiment, measuringthe gap comprises scanning the gap across an optical beam and measuringan intensity variation in a reflection of the optical beam. In anembodiment, determining the center of the substrate using themeasurements of the gap comprises determining a position of the edge ofthe substrate and calculating the position of the center of thesubstrate from the position of the edge. In an embodiment, the substrateis disposed inside the depression and removed from the depression usinga substrate handler. In an embodiment, the method further comprisescalibrating the substrate handler to take into account the globalcentering offset. In an embodiment, calibrating the substrate handlerincludes shifting positioning of substrates by the substrate handler byan offset to correct for the global centering offset so that asubsequently positioned substrate is substantially centered inside thedepression. In an embodiment, calibrating the substrate handler includescorrecting for substrate positioning so that the gap of a subsequentlypositioned substrate is equally wide inside the depression.

In an embodiment, there is provided a method for determining an offsetbetween a center of a substrate and a center of a depression in a chuck,comprising: loading the substrate on a pin of the chuck and moving thesubstrate by translating the pin in a first direction until thesubstrate reaches an opening of the depression in the chuck; determiningto what extent the substrate should be translated in a planesubstantially perpendicular to the first direction to allow thesubstrate to enter inside the depression without colliding with asurface of the chuck or an edge of the depression in the chuck; anddetermining the offset of the substrate relative to the depression fromdetermination of the translation in the plane.

In an embodiment, determining to what extent the substrate should betranslated comprises translating the substrate, in the plane on the pinrelative to the chuck, translating the chuck, in the plane, relative tothe substrate or the pin, or both, until a footprint of the substratewould fit into the depression. In an embodiment, loading the substrateon a pin of the chuck is performed with a substrate handler. In anembodiment, the method further comprises calibrating the substratehandler to take into account the offset. In an embodiment, calibratingthe substrate handler includes shifting positioning of substrates by ofthe substrate handler by an amount to correct for the offset so that asubsequently positioned substrate is substantially centered inside thedepression. In an embodiment, calibrating the substrate handler includescorrecting for substrate positioning so that the gap of a subsequentlypositioned substrate is equally wide inside the depression.

In an embodiment, there is provided lithographic projection apparatuscomprising: a support structure configured to hold a patterning device,the patterning device configured to pattern a beam of radiationaccording to a desired pattern; a substrate table configured to hold asubstrate, the substrate table having a depression configured to receivethe substrate; a projection system configured to project the patternedbeam onto a target portion of the substrate; a liquid supply systemconfigured to provide a liquid, through which the patterned beam is tobe projected, in a space between the projection system and thesubstrate; a sensor configured to measure a position of the substrate, asensor configured to measure a gap between an edge of the substratedisposed inside the depression and an edge of the depression, or asensor configured to measure both the position and the gap; and asubstrate handling system in communication with the sensor configured toposition the substrate inside the depression such that the gap betweenthe edge of the substrate and the edge of the depression issubstantially uniform inside the depression.

In an embodiment, the substrate handling system is configured to becalibrated to correct for an offset between the substrate and thedepression. In an embodiment, the substrate handling system isconfigured to determine an offset between a center of the substrate anda center of the depression. In an embodiment, the sensor configured tomeasure the position of the substrate is configured to measure aposition of an alignment mark of a test substrate disposed inside thedepression, and wherein the substrate handling system is configured todetermine an offset between a center of the test substrate and a centerof the depression from the position of the alignment mark measured bythe sensor. In an embodiment, the substrate handling system isconfigured to determine to what extent the substrate should betranslated in a plane substantially parallel to the substrate table toallow the substrate to enter inside the depression without collidingwith a surface of the substrate table or an edge of the depression. Inan embodiment, the substrate handling system is configured to determinean offset between the substrate and the depression from determination ofthe translation in the plane. In an embodiment, the substrate handlingsystem is configured to determine a center of the substrate usingmeasurements of the gap and to determine an offset of the substratebetween a center of the depression and the measured center of thesubstrate. In an embodiment, the apparatus further comprises aprealigner configured to measure a center of the substrate at theprealigner and wherein the substrate handling system is configured todetermine a centering offset at the prealigner between a nominal centerof the substrate and the measured center of the substrate at theprealigner. In an embodiment, the substrate handling system isconfigured to combine the offset of the substrate and the centeringoffset to obtain a global centering offset.

In European Patent Application No. 03257072.3, the idea of a twin ordual stage immersion lithography apparatus is disclosed. Such anapparatus is provided with two tables for supporting a substrate.Leveling measurements are carried out with a table at a first position,without immersion liquid, and exposure is carried out with a table at asecond position, where immersion liquid is present. Alternatively, theapparatus has only one table.

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications, such as the manufacture of integrated opticalsystems, guidance and detection patterns for magnetic domain memories,flat-panel displays, liquid-crystal displays (LCDs), thin-film magneticheads, etc. The skilled artisan will appreciate that, in the context ofsuch alternative applications, any use of the terms “wafer” or “die”herein may be considered as synonymous with the more general terms“substrate” or “target portion”, respectively. The substrate referred toherein may be processed, before or after exposure, in for example atrack (a tool that typically applies a layer of resist to a substrateand develops the exposed resist), a metrology tool and/or an inspectiontool. Where applicable, the disclosure herein may be applied to such andother substrate processing tools. Further, the substrate may beprocessed more than once, for example in order to create a multi-layerIC, so that the term substrate used herein may also refer to a substratethat already contains multiple processed layers.

The terms “radiation” and “beam” used herein encompass all types ofelectromagnetic radiation, including ultraviolet (UV) radiation (e.g.having a wavelength of or about 365, 248, 193, 157 or 126 nm).

The term “lens”, where the context allows, may refer to any one orcombination of various types of optical components, including refractiveand reflective optical components.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. For example, where applicable, the invention may takethe form of a computer program containing one or more sequences ofmachine-readable instructions describing a method as disclosed above, ora data storage medium (e.g. semiconductor memory, magnetic or opticaldisk) having such a computer program stored therein.

The present invention can be applied to any immersion lithographyapparatus, in particular, but not exclusively, those types mentionedabove. The immersion liquid used in the apparatus may have differentcompositions, according to the desired properties and the wavelength ofexposure radiation used. For an exposure wavelength of 193 nm, ultrapure water or water-based compositions may be used and for this reasonthe immersion liquid is sometimes referred to as water and water-relatedterms such as hydrophilic, hydrophobic, humidity, etc. may be used.

The descriptions above are intended to be illustrative, not limiting.Thus, it will be apparent to one skilled in the art that modificationsmay be made to the invention as described without departing from thescope of the claims set out below.

We claim:
 1. A lithographic projection apparatus comprising: a substratetable configured to hold a substrate, the substrate table having adepression configured to receive the substrate; a projection systemconfigured to project a patterned beam onto a substrate target portion;a liquid supply system configured to provide a liquid, through which thepatterned beam is to be projected, in a space between the projectionsystem and the substrate table; a sensor system configured to measure aposition of the substrate when disposed inside the depression, tomeasure a characteristic of a gap between an edge of the substrate whendisposed inside the depression and an edge of the depression, or tomeasure both the position and the characteristic of the gap; and asubstrate handling system configured to position, using the measurementby the sensor system or a parameter derived from the measurement,another substrate to inside the depression such that the gap between theedge of the substrate and the edge of the depression is substantiallyuniform inside the depression.
 2. The apparatus according to claim 1,wherein the substrate handling system or the sensor system is furtherconfigured to determine an offset between a center of the substrate anda center of the depression.
 3. The apparatus according to claim 1,wherein the substrate is a test substrate and wherein the sensor systemis further configured to measure a position of an alignment mark of thetest substrate when disposed inside the depression, and wherein thesubstrate handling system or the sensor system is further configured todetermine an offset between a center of the test substrate and a centerof the depression from the position of the alignment mark measured bythe sensor system.
 4. The apparatus according to claim 1, wherein thesubstrate handling system or the sensor system is further configured todetermine to what extent the other substrate should be translated in aplane substantially parallel to the substrate table to allow the othersubstrate to enter inside the depression without colliding with asurface of the substrate table or the edge of the depression.
 5. Theapparatus according to claim 1, wherein the substrate handling system orthe sensor system is further configured to determine a center of thesubstrate using measurements of the gap and to determine a substrateoffset of the substrate between a center of the depression and thedetermined center of the substrate.
 6. The apparatus according to claim5, further comprising a prealigner configured to measure a center of theother substrate at the prealigner and wherein the substrate handlingsystem, the sensor system or the prealigner is further configured todetermine a centering offset at the prealigner between a nominal centerof the other substrate and the determined center of the other substrateat the prealigner.
 7. The apparatus according to claim 6, wherein thesubstrate handling system or the sensor system is further configured tocombine the substrate offset and the centering offset to obtain a globalcentering offset.
 8. The apparatus according to claim 1, wherein thesubstrate handling system is further configured to be calibrated tocorrect for an offset between the substrate and the depression.
 9. Theapparatus according to claim 1, wherein the sensor system is configuredmeasure a position of the substrate when disposed inside the depression.10. The apparatus according to claim 1, wherein the sensor system isconfigured to measure a characteristic of a gap between an edge of thesubstrate when disposed inside the depression and an edge of thedepression.
 11. A non-transitory computer-readable medium comprisinginstructions thereon configured to cause a hardware processor to: (i)cause measurement of a gap between an edge of a substrate or of anothersubstrate and an edge of a depression of a substrate table of alithographic apparatus, or (ii) cause measurement of a position of thesubstrate or of another substrate, or (iii) cause measurement of theedge of the depression, or (iv) any combination selected from (i)-(iii);and using the measurement or a parameter derived from the measurement,cause positioning of the substrate inside the depression such that thegap between the edge of the substrate and the edge of the depression issubstantially uniform inside the depression and/or cause positioning ofthe substrate so as to allow the substrate to enter inside thedepression without colliding with a surface of the substrate table orthe edge of the depression in the substrate table.
 12. Thenon-transitory computer-readable medium according to claim 11, whereinthe instructions are configured to cause measurement of the edge of thedepression and further configured to calculate a center of thedepression from the measured edge of the depression and cause thepositioning using the calculated center of the depression.
 13. Thenon-transitory computer-readable medium according to claim 11, whereinthe instructions are further configured to determine a centering offsetbetween a center of the depression and a center of the substrate or ofthe other substrate, and cause the positioning using the centeringoffset.
 14. The non-transitory computer-readable medium according toclaim 11, wherein the instructions are configured to cause measurementof the gap by scanning the gap across an optical beam and measuring anintensity variation in a reflection of the optical beam.
 15. Thenon-transitory computer-readable medium according to claim 11, whereinthe instructions are configured to measure the gap and furtherconfigured to determine a center of the substrate or of the othersubstrate using the measurements of the gap by determining a position ofthe edge of the substrate or the other substrate and calculating theposition of the center of the substrate or the other substrate from theposition of the edge.
 16. The non-transitory computer-readable mediumaccording to claim 11, wherein the instructions are configured to causethe substrate to be disposed inside the depression and removed from thedepression using a substrate handler.
 17. The non-transitorycomputer-readable medium according to claim 16, wherein the instructionsare further configured to calibrate the substrate handler to take intoaccount at least a centering offset between a center of the depressionand a center of the substrate or the other substrate.
 18. Thenon-transitory computer-readable medium according to claim 17, whereinthe instructions are configured to calibrate the substrate handler byshifting positioning of substrates by the substrate handler by an offsetto correct for the centering offset so that a subsequently positionedsubstrate is substantially centered inside the depression.
 19. Thenon-transitory computer-readable medium according to claim 17, whereinthe instructions are configured to calibrate the substrate handler bycorrecting for substrate positioning so that the gap of a subsequentlypositioned substrate is substantially equally wide inside thedepression.
 20. A non-transitory computer-readable medium comprisinginstructions thereon configured to cause a hardware processor to: causemeasurement of a parameter of the substrate or of another substrateand/or of a parameter of an edge of a depression of a substrate table ofa lithographic apparatus; determine an offset between a position of aportion of the substrate and a portion of the depression based on themeasured parameter; cause positioning, using the offset, the substrateto enter inside the depression without colliding with a surface of thesubstrate table or the edge of the depression in the substrate table.21. The non-transitory computer-readable medium according to claim 20,wherein the instructions are configured to measure the parameter of thesubstrate or the other substrate, the measurement comprising measurementof a mark on the substrate or the other substrate and the determinationof the offset further comprising determination of a relative positionbetween the substrate or other substrate and the depression based on themeasured mark.
 22. The non-transitory computer-readable medium accordingto claim 20, wherein the instructions are configured to measure theparameter of the substrate or the other substrate, the measurementcomprising measurement of characteristic of a gap between the edge ofthe depression and an edge of the substrate or the other substrate andthe determination of the offset further comprising determination of aposition of the portion of the substrate or other substrate based on themeasured characteristic of the gap.
 23. The non-transitorycomputer-readable medium according to claim 20, wherein the instructionsare configured to measure the parameter of the edge of the depressionand the determination of the offset further comprises determination of aposition of the portion of the depression based on the measuredparameter of the edge of the depression.
 24. The non-transitorycomputer-readable medium according to claim 20, wherein the instructionsare further configured cause placement of the substrate substantiallycentered into the depression.
 25. The non-transitory computer-readablemedium according to claim 20, wherein the instructions are configured todetermine the offset by determining an offset between a center of thesubstrate or the other substrate, and a center of the depression. 26.The non-transitory computer-readable medium according to claim 20,wherein the instructions are configured to cause the positioning bycausing placement of the substrate into the depression with an uppersurface of the substrate being at substantially a same level as an uppersurface of the substrate table.
 27. The non-transitory computer-readablemedium according to claim 20, wherein the instructions are configured tocause the positioning by causing placement of the substrate inside thedepression such that a gap around the substrate and between an edge ofthe substrate and the edge of the depression is substantially uniforminside the depression.
 28. A lithographic projection apparatuscomprising: a substrate table configured to hold a substrate, thesubstrate table having a depression configured to receive the substrate;a projection system configured to project a patterned beam onto asubstrate target portion; a sensor system configured to measure thesubstrate or another substrate; and a substrate handling systemconfigured to determine, based on measurement by the sensor system, anoffset of a portion of the substrate or of another substrate, withrespect to a portion of the depression, and configured to position thesubstrate to inside the depression by shifting a position of thesubstrate to correct for the offset to allow the substrate to enterinside the depression without colliding with a surface of the substratetable or an edge of the depression in the substrate table.
 29. Theapparatus according to claim 28, wherein the substrate handling systemis further configured to place the substrate substantially centered intothe depression.
 30. The apparatus according to claim 28, wherein thesubstrate handling system comprises a movable pin located at thesubstrate table.
 31. The apparatus according to claim 28, wherein thesubstrate handling system is further configured to shift the position ofthe substrate by translating the substrate above the depression.
 32. Theapparatus according to claim 28, wherein the substrate handling systemis further configured to determine a position of a central point of thedepression.
 33. The apparatus according to claim 32, wherein the sensorsystem is further configured to measure the edge of the depression andthe substrate handling system is further configured to determine theposition of the central point of the depression based on the measurededge of the depression.
 34. The apparatus according to claim 28, whereinthe substrate handling system is further configured to determine aposition of a central portion of the substrate based on the measurementof the substrate.
 35. The apparatus according to claim 28, wherein thesubstrate handling system is further configured to place the substrateinto the depression with an upper surface of the substrate being atsubstantially a same level as an upper surface of the substrate table.36. The apparatus according to claim 28, further comprising a liquidsupply system configured to provide a liquid, through which thepatterned beam is to be projected, in a space between the projectionsystem and the substrate table.
 37. A lithographic projection apparatuscomprising: a substrate table configured to hold a substrate, thesubstrate table having a depression configured to receive the substrate;a projection system configured to project a patterned beam onto asubstrate target portion; a sensor system configured to measure (i) acharacteristic of a gap between an edge of the substrate, or of anothersubstrate, when disposed inside the depression and an edge of thedepression, or (ii) measure the edge of the depression, or (iii) both(i) and (ii); and a substrate handling system configured to position,using the measurement by the sensor system, the substrate so as to allowthe substrate to enter inside the depression without colliding with asurface of the substrate table or the edge of the depression in thesubstrate table.
 38. The apparatus according to claim 37, wherein thesensor system is configured to measure the edge of the depression. 39.The apparatus according to claim 38, wherein the substrate handlingsystem is further configured to position the substrate using a positionof a point of the depression determined based on the measured edge ofthe depression.
 40. The apparatus according to claim 37, wherein thesensor system is configured to measure the characteristic of the gapbetween an edge of the substrate, or of another substrate, when disposedinside the depression and an edge of the depression.
 41. The apparatusaccording to claim 40, wherein the substrate handling system is furtherconfigured to position the substrate using a position of a point of thesubstrate or the other substrate determined based on the measuredcharacteristic of the gap.
 42. The apparatus according to claim 37,wherein the substrate handling system is further configured to determinean offset between a center of the substrate or the other substrate, anda center of the depression, and to position the substrate using theoffset.
 43. The apparatus according to claim 37, wherein the substratehandling system is configured to place the substrate substantiallycentered into the depression.
 44. The apparatus according to claim 37,wherein the substrate handling system is further configured to determineto what extent the substrate should be translated in a planesubstantially parallel to the substrate table to allow the substrate toenter inside the depression without colliding with a surface of thesubstrate table or the edge of the depression.
 45. The apparatusaccording to claim 37, further comprising a liquid supply systemconfigured to provide a liquid, through which the patterned beam is tobe projected, in a space between the projection system and the substratetable.
 46. A lithographic projection apparatus comprising: a substratetable configured to hold a substrate, the substrate table having adepression configured to receive the substrate; a projection systemconfigured to project a patterned beam onto a substrate target portion;a sensor system configured to measure a parameter of an edge of thedepression of the substrate table; and a substrate handling systemconfigured to determine an offset between a position of a portion of thesubstrate and a portion of the depression based on the measuredparameter and configured to position, using the offset, the substrate toenter inside the depression without colliding with a surface of thesubstrate table or the edge of the depression in the substrate table.47. The apparatus according to claim 46, wherein the sensor system isfurther configured to measure a mark on the substrate or the othersubstrate and the substrate handling system is further configured todetermine a relative position between the substrate or other substrateand a part of the substrate table.
 48. The apparatus according to claim46, wherein the sensor system is further configured to measure acharacteristic of a gap between the edge of the depression and an edgeof the substrate or the other substrate and the substrate handlingsystem is further configured to determine a position of the portion ofthe substrate or other substrate based on the measured characteristic ofthe gap.
 49. The apparatus according to claim 46, wherein the substratehandling system is further configured to determine a position of theportion of the depression based on the measured parameter of the edge ofthe depression.
 50. The apparatus according to claim 46, wherein thesubstrate handling system is further configured to place the substratesubstantially centered into the depression.
 51. The apparatus accordingto claim 46, wherein the substrate handling system is configured todetermine an offset between a center of the substrate or the othersubstrate, and a center of the depression.
 52. The apparatus accordingto claim 46, further comprising a liquid supply system configured toprovide a liquid, through which the patterned beam is to be projected,in a space between the projection system and the substrate.
 53. Theapparatus according to claim 46, wherein the substrate handling systemis further configured to place the substrate into the depression with anupper surface of the substrate being at substantially a same level as anupper surface of the substrate table.
 54. The apparatus according toclaim 46, wherein the substrate handling system is further configured toplace the substrate inside the depression such that a gap around thesubstrate and between an edge of the substrate and the edge of thedepression is substantially uniform inside the depression.
 55. Theapparatus according to claim 46, wherein the substrate handling systemcomprises a movable pin located at the substrate table.
 56. Alithographic projection apparatus comprising: a substrate tableconfigured to hold a substrate, the substrate table having a depressionconfigured to receive the substrate; a projection system configured toproject a patterned beam onto a substrate target portion; a sensorsystem configured to measure a parameter of a position of a part of thesubstrate or another substrate, when disposed inside the depression ofthe substrate table; and a substrate handling system configured todetermine an offset between a position of a portion of the substrate anda portion of the depression based on the measured parameter andconfigured to position, using the offset, the substrate to enter insidethe depression without colliding with a surface of the substrate tableor the edge of the depression in the substrate table.
 57. The apparatusaccording to claim 56, wherein the sensor system is further configuredto measure a characteristic of the substrate or the other substrateduring exposure.
 58. The apparatus according to claim 56, wherein thesensor system is configured to measure a characteristic of a gap betweenthe edge of the depression and an edge of the substrate or the othersubstrate.
 59. The apparatus according to claim 58, wherein thesubstrate handling system is further configured to determine a positionof the portion of the substrate or other substrate based on the measuredcharacteristic of the gap.
 60. The apparatus according to claim 58,wherein the substrate handling system is further configured to determinea position of a portion of the depression based on the measuredcharacteristic of the gap.
 61. The apparatus according to claim 56,wherein the substrate handling system is further configured to place thesubstrate substantially centered into the depression.
 62. The apparatusaccording to claim 56, wherein the substrate handling system isconfigured to determine an offset between a center of the substrate orthe other substrate, and a center of the depression.
 63. The apparatusaccording to claim 56, further comprising a liquid supply systemconfigured to provide a liquid, through which the patterned beam is tobe projected, in a space between the projection system and thesubstrate.
 64. The apparatus according to claim 56, wherein thesubstrate handling system is further configured to place the substrateinto the depression with an upper surface of the substrate being atsubstantially a same level as an upper surface of the substrate table.65. The apparatus according to claim 56, wherein the substrate handlingsystem is further configured to place the substrate inside thedepression such that a gap around the substrate and between an edge ofthe substrate and the edge of the depression is substantially uniforminside the depression.
 66. The apparatus according to claim 56, whereinthe substrate handling system comprises a movable pin located at thesubstrate table.